These are Skywalker Sound sound effects of sparks chirping, clicking, hissing, etc. Most of these sounds / sound effect clusters/combos were probably designed by Ben Burtt. One of the spark chirps, SKYWALKER, ELECTRICITY - SINGLE SPARK CHIRP 02 (see first audio sample), debuted in Star Wars: Episode V - The Empire Strikes Back (1980); possibly created by Ben Burtt. Links: https://soundeffects.fandom.com/wiki/SKYWALKER,_ELECTRICITY_-_BIG_VARIOUS_SPARKINGS#Audio_Samples